Behaviour of a Well-Designed Megasonic Cleaning System

Lippert, Alexander; Engesser, P.; Ferrell, Garry; Klitzke, J.; Köffler, Martin; Kumnig, Franz; Leberzammer, Jörg; Pfeuffer, Alexander; Obweger, Rainer; Sax, Harry; Okorn-Schmidt, Harald

期刊名称Solid State Phenomena
作者Lippert, Alexander; Engesser, P.; Ferrell, Garry; Klitzke, J.; Köffler, Martin; Kumnig, Franz; Leberzammer, Jörg; Pfeuffer, Alexander; Obweger, Rainer; Sax, Harry; Okorn-Schmidt, Harald
电子ISSN1662-9779
文件大小685.99KB
发表时间2005
DOI10.4028/www.scientific.net/SSP.103-104.155
页码155-158

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Behaviour of a Well-Designed Megasonic Cleaning System