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Preparation of 128 element of IR detector array based on vanadium oxide thin films obtained by ion beam sputtering

Preparation of 128 element of IR detector array based on vanadium oxide thin films obtained by ion beam sputtering

S.B. Wang; B.F. Xiong; S.B. Zhou; G. Huang; S.H. Chen; X.J. Yi
  • 作者S.B. Wang; B.F. Xiong; S.B. Zhou; G. Huang; S.H. Chen; X.J. Yi
  • 卷第117卷
  • 期第1期
  • 印刷ISSN0924-4247
  • 文件大小228.14KB
  • 发表时间2005
  • DOI10.1016/j.sna.2004.06.005
  • 页码110-114
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