Kinetic Model of Si Oxidation at HfO
2
/Si Interface with Post Deposition Annealing
Shimizu, Haruka; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira
- 期刊名称Japanese Journal of Applied Physics
- 作者Shimizu, Haruka; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira
- 卷第44卷
- 期第8期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小630.57KB
- 发表时间2005-8-5
- DOI10.1143/jjap.44.6131
- 页码6131-6135