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Chemically Conformal ALD of SrTiO[sub 3] Thin Films Using Conventional Metallorganic Precursors

Chemically Conformal ALD of SrTiO[sub 3] Thin Films Using Conventional Metallorganic Precursors

Kwon, Oh Seong; Kim, Seong Keun; Cho, Moonju; Hwang, Cheol Seong; Jeong, Jaehack
  • 期刊名称Journal of The Electrochemical Society
  • 作者Kwon, Oh Seong; Kim, Seong Keun; Cho, Moonju; Hwang, Cheol Seong; Jeong, Jaehack
  • 卷第152卷
  • 期第4期
  • 印刷ISSN0013-4651
  • 文件大小1135.04KB
  • 发表时间2005
  • DOI10.1149/1.1869292
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