SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Advances in Optical Thin Films II - Oxide and fluoride coatings for the excimer wavelength 193nm
Götzelmann, Rainer; Hagedorn, Harro; Zöller, Alfons; Kobiak, Alexei; Klug, Werner; Amra, Claude; Kaiser, Norbert; Macleod, H. Angus
- 作者Götzelmann, Rainer; Hagedorn, Harro; Zöller, Alfons; Kobiak, Alexei; Klug, Werner; Amra, Claude; Kaiser, Norbert; Macleod, H. Angus
- 卷第5963卷
- 印刷ISSN0277-786X
- 文件大小420.67KB
- 发表时间2005
- DOI10.1117/12.625152