[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (2005.02.3-2005.02.3)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - 18th IEEE International Conference on Micro Electro Mechanical Systems (IEEE Cat. No.05CH37610)
- 文件大小193.24KB
- 发表时间2005
- DOI10.1109/memsys.2005.1453842
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