SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - Fabrication of optical waveguide multilayer storage devices
- 作者Gu, Minfen; Esashi, Masayoshi; Zhou, Zhaoying; Ding, Dongyan; Liang, Zhongcheng; Chen, Jiabi; Zhuang, Songlin
- 卷第6032卷
- 印刷ISSN0277-786X
- 文件大小628.56KB
- 发表时间2005
- DOI10.1117/12.667860
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