SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - A study on high isolation RF MEMS switch

• 作者Lin, Lingling; Esashi, Masayoshi; Zhou, Zhaoying; Hu, Guoqing; Lin, Zonghua; Liu, Wenyan
• 卷第6032卷
• 印刷ISSN0277-786X
• 文件大小295.05KB
• 发表时间2005
• DOI10.1117/12.667883