Precision Machining of Electroless Nickel Mandrel and Fabrication of Replicated Mirrors for a Soft X-Ray Microscope(Ultra-precision machining)
- 期刊名称Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
- 作者Chon, Kwon Su; Namba, Yoshiharu; Yoon, Kwon-Ha
- 卷第2005卷
- 电子ISSN2424-3086
- 文件大小784.34KB
- 发表时间2005
- DOI10.1299/jsmelem.2005.3.1047
- 页码1047-1050
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