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SOI-CMOS compatible low-power gas sensor using sputtered and drop-coated metal-oxide active layers

P. Ivanov; J. Laconte; J. P. Raskin; M. Stankova; E. Sotter; E. Llobet; X. Vilanova; D. Flandre; X. Correig

作者P. Ivanov; J. Laconte; J. P. Raskin; M. Stankova; E. Sotter; E. Llobet; X. Vilanova; D. Flandre; X. Correig
卷第12卷
印刷ISSN0946-7076
电子ISSN1432-1858
文件大小617.12KB
发表时间2005-12
DOI10.1007/s00542-005-0003-0
页码160-168