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Tunable Fabry-Perot surface micromachined interferometer-experiments and modeling

Raluca Müller; Dana Cristea; C. Tibeica; P. Arguel; P. Pons; F. Rossel; D. Syvridis; M. Kusko

作者Raluca Müller; Dana Cristea; C. Tibeica; P. Arguel; P. Pons; F. Rossel; D. Syvridis; M. Kusko
卷第12卷
印刷ISSN0946-7076
电子ISSN1432-1858
文件大小455.09KB
发表时间2005-12
DOI10.1007/s00542-005-0021-y
页码91-97