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Ion-induced interface layer formation in W/Si and WRe/Si multilayers

Ion-induced interface layer formation in W/Si and WRe/Si multilayers

M.J.H. Kessels; J. Verhoeven; F.D. Tichelaar; F. Bijkerk

作者M.J.H. Kessels; J. Verhoeven; F.D. Tichelaar; F. Bijkerk
卷第582卷
印刷ISSN0039-6028
文件大小333.82KB
发表时间2005
DOI10.1016/j.susc.2005.03.019
页码227-234

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