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SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - MEMS-based thin palladium membrane microreactors

Ye, S.-Y.; Tanaka, S.; Esashi, M.; Hamakawa, S.; Hanaoka, T; Mizukami, F.; Esashi, Masayoshi; Zhou, Zhaoying

作者Ye, S.-Y.; Tanaka, S.; Esashi, M.; Hamakawa, S.; Hanaoka, T; Mizukami, F.; Esashi, Masayoshi; Zhou, Zhaoying
卷第6032卷
印刷ISSN0277-786X
文件大小667.89KB
发表时间2006
DOI10.1117/12.667851