Design, fabrication and characterization of metal embedded thin film thermocouples with various film thicknesses and junction sizes
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Zhang, Xugang; Choi, Hongseok; Datta, Arindom; Li, Xiaochun
- 卷第16卷
- 期第5期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小309.64KB
- 发表时间2006-05-01
- DOI10.1088/0960-1317/16/5/004
- 页码900-905
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