Model Development for Atomic Force Microscope Stage Mechanisms
- 期刊名称SIAM Journal on Applied Mathematics
- 作者Ralph C. Smith, Andrew G. Hatch, Tathagata De, Murti V. Salapaka, Ricardo C. H. Del Rosario and Julie K. Raye
- 卷第66卷
- 期第6期
- 印刷ISSN0036-1399
- 文件大小2027.15KB
- 发表时间2006
- DOI10.2307/40233359
- 页码1998-2026
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