Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units

Takenaka, Kosuke; Setsuhara, Yuichi; Nishisaka, Kazuaki; Ebe, Akinori; Sugiura, Shinya; Takahashi, Kazuo; Ono, Koichi

期刊名称Japanese Journal of Applied Physics
作者Takenaka, Kosuke; Setsuhara, Yuichi; Nishisaka, Kazuaki; Ebe, Akinori; Sugiura, Shinya; Takahashi, Kazuo; Ono, Koichi
卷第45卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小170.29KB
发表时间2006-10-24
DOI10.1143/JJAP.45.8046
页码8046-8049

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