[IEEE The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Traverse City, MI, USA (2006.06.4-2006.06.8)] The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Uniform and long-slit microwave plasma generation from a longitudinal section electric mode coupling
Hae Jin Kim, ; Jin Joo Choi, ; Jung Mi Hong,
- 作者Hae Jin Kim, ; Jin Joo Choi, ; Jung Mi Hong,
- 文件大小129.50KB
- 发表时间2006
- DOI10.1109/plasma.2006.1706930
- 页码58-58