A Survey of Automated Material Handling Systems in 300-mm Semiconductor Fabs
Agrawal, G.K.; Heragu, S.S.
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Agrawal, G.K.; Heragu, S.S.
- 卷第19卷
- 期第1期
- 印刷ISSN0894-6507
- 文件大小287.11KB
- 发表时间2006-02
- DOI10.1109/tsm.2005.863217
- 页码112-120