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Optical and crystallographic analysis of thin films of GeC deposited using a unique hollow cathode sputtering technique

Optical and crystallographic analysis of thin films of GeC deposited using a unique hollow cathode sputtering technique

J.L. Huguenin-Love; R.J. Soukup; N.J. Ianno; J.S. Schrader; D.W. Thompson; V.L. Dalal
  • 作者J.L. Huguenin-Love; R.J. Soukup; N.J. Ianno; J.S. Schrader; D.W. Thompson; V.L. Dalal
  • 卷第9卷
  • 印刷ISSN1369-8001
  • 文件大小243.22KB
  • 发表时间2006
  • DOI10.1016/j.mssp.2006.08.026
  • 页码759-763
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