Xe+-irradiation effects on multilayer thin-film optical surfaces in EUV lithography

J.P. Allain; A. Hassanein; M.M.C. Allain; B.J. Heuser; M. Nieto; C. Chrobak; D. Rokusek; B. Rice

作者J.P. Allain; A. Hassanein; M.M.C. Allain; B.J. Heuser; M. Nieto; C. Chrobak; D. Rokusek; B. Rice
卷第242卷
印刷ISSN0168-583X
文件大小121.10KB
发表时间2006
DOI10.1016/j.nimb.2005.08.188
页码520-522

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