Formation of germanium nanocrystals embedded in silicon-oxygen-nitride layer
- 期刊名称Applied Physics Letters
- 作者Tu, Chun-Hao; Chang, Ting-Chang; Liu, Po-Tsun; Liu, Hsin-Chou; Tsai, Chia-Chou; Chang, Li-Ting; Tseng, Tseung-Yuan; Sze, Simon M.; Chang, Chun-Yen
- 卷第89卷
- 期第5期
- 印刷ISSN0003-6951
- 文件大小506.44KB
- 发表时间2006
- DOI10.1063/1.2227059
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