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[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Spring-On-Tip Nanolithography Probes

[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Spring-On-Tip Nanolithography Probes

Xuefeng Wang, ; Vincent, L.; Chang Liu,

作者Xuefeng Wang, ; Vincent, L.; Chang Liu,
文件大小906.97KB
发表时间2006
DOI10.1109/memsys.2006.1627771
页码202-205

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