Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging
- 期刊名称Applied Physics Letters
- 作者Papaioannou, G. J.; Exarchos, M.; Theonas, V.; Psychias, J.; Konstantinidis, G.; Vasilache, D.; Muller, A.; Neculoiu, D.
- 卷第89卷
- 期第10期
- 印刷ISSN0003-6951
- 文件大小366.77KB
- 发表时间2006
- DOI10.1063/1.2347278
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