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[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Pneumatically Actuated, Membrane-Based, Micro-Optical Devices

[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Pneumatically Actuated, Membrane-Based, Micro-Optical Devices

Werber, A.; Zappe, H.

作者Werber, A.; Zappe, H.
文件大小856.36KB
发表时间2006
DOI10.1109/memsys.2006.1627932
页码846-849

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