: A first-principles investigation
- 期刊名称Physical Review B
- 作者Liao, Ting; Wang, Jingyang; Zhou, Yanchun
- 卷第74卷
- 期第17期
- 印刷ISSN1098-0121
- 电子ISSN1550-235X
- 文件大小642.66KB
- 发表时间2006-11-16
- DOI10.1103/physrevb.74.174112
[IEEE [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - San Francisco, CA, USA (1993.07.19-1993.07.20)] [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - IEEE/SEMI International Semiconductor Manufacturing Science Symposium (Cat. No.93CH3280-5)1993
[IEEE [1993] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - San Francisco, CA, USA (19-20 July 1993)] [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - Uniformity measures in semiconductor manufacturingHurwitz, A.M. · 1993
[IEEE [1993] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - San Francisco, CA, USA (19-20 July 1993)] [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - A prospectus for gigascale integration (GSI)Meindl, J.D. · 1993
[IEEE [1993] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - San Francisco, CA, USA (19-20 July 1993)] [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - Diagnostic monitoring of photoresist ashingStefani, J.A.; Loewenstein, L.M.; Sullivan, M. · 1993
[IEEE [1993] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - San Francisco, CA, USA (19-20 July 1993)] [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - A method for accelerating cycles of learning in the semiconductor equipment industryKeller, E.; Bukhman, J. · 1993
[IEEE [1993] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - San Francisco, CA, USA (19-20 July 1993)] [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - A joint partnership for improving undergraduate microelectronics instructionFeugate, R.J. · 1993
[IEEE [1993] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - San Francisco, CA, USA (19-20 July 1993)] [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - Programmable factory IC manufacturing for the 21st centurySaraswat, K.C. · 1993