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Rapid prototyping of silica glass microstructures by the LIBWE method: Fabrication of deep microtrenches

Yoshizo Kawaguchi; Tadatake Sato; Aiko Narazaki; Ryozo Kurosaki; Hiroyuki Niino

作者Yoshizo Kawaguchi; Tadatake Sato; Aiko Narazaki; Ryozo Kurosaki; Hiroyuki Niino
卷第182卷
期第3期
印刷ISSN1010-6030
文件大小342.82KB
发表时间2006
DOI10.1016/j.jphotochem.2006.05.033
页码319-324