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The Effects of Deposition Pressure on the Optical and Structural Properties of d.c. PECVD Hydrogenated Amorphous Carbon Films

Awang, Rozidawati; Tong, Goh Boon; Ab. Gani, Siti Meriam; Ritikos, Richard; Abdul Rahman, Saadah

期刊名称Materials Science Forum
作者Awang, Rozidawati; Tong, Goh Boon; Ab. Gani, Siti Meriam; Ritikos, Richard; Abdul Rahman, Saadah
卷第517卷
电子ISSN1662-9752
文件大小300.33KB
发表时间2006
DOI10.4028/www.scientific.net/MSF.517.81
页码81-84