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Microstructural and mechanical investigations of tungsten carbide films deposited by reactive RF sputtering

Microstructural and mechanical investigations of tungsten carbide films deposited by reactive RF sputtering

K. Abdelouahdi; C. Sant; C. Legrand-Buscema; P. Aubert; J. Perrière; G. Renou; Ph. Houdy
  • 作者K. Abdelouahdi; C. Sant; C. Legrand-Buscema; P. Aubert; J. Perrière; G. Renou; Ph. Houdy
  • 卷第200卷
  • 印刷ISSN0257-8972
  • 文件大小277.29KB
  • 发表时间2006
  • DOI10.1016/j.surfcoat.2005.11.015
  • 页码6469-6473
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