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SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - <title>Research on micro/nano film getters for vacuum maintenance of MEMS</title>

SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - Research on micro/nano film getters for vacuum maintenance of MEMS

Jin, Yufeng; Zhao, Ying; Esashi, Masayoshi; Zhou, Zhaoying

作者Jin, Yufeng; Zhao, Ying; Esashi, Masayoshi; Zhou, Zhaoying
卷第6032卷
印刷ISSN0277-786X
文件大小306.31KB
发表时间2006
DOI10.1117/12.667858

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