Integration issues for siloxane-based hydrogen silsesquioxane (HSQ) applied on TFT-LCDs
Ta-Shan Chang; Ting-Chang Chang; Po-Tsun Liu; Tien-Shan Chang; Feng-Sheng Yeh
- 作者Ta-Shan Chang; Ting-Chang Chang; Po-Tsun Liu; Tien-Shan Chang; Feng-Sheng Yeh
- 卷第498卷
- 印刷ISSN0040-6090
- 文件大小254.81KB
- 发表时间2006
- DOI10.1016/j.tsf.2005.07.068
- 页码70-74