Active dopant characterization methodology for germanium
- 作者T. Clarysse; P. Eyben; T. Janssens; I. Hoflijk; D. Vanhaeren; A. Satta; M. Meuris; W. Vandervorst; J. Bogdanowicz; G. Raskin
- 文件大小1213.67KB
- 发表时间2006
- DOI10.1116/1.2163880
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