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Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etching

Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etching

C. H. Hsu; Y. F. Huang; L. C. Chen; S. Chattopadhyay; K. H. Chen; H. C. Lo; C. F. Chen
  • 作者C. H. Hsu; Y. F. Huang; L. C. Chen; S. Chattopadhyay; K. H. Chen; H. C. Lo; C. F. Chen
  • 文件大小523.98KB
  • 发表时间2006
  • DOI10.1116/1.2163894
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