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Micromachined integrated pressure—thermal sensors on flexible substrates

Micromachined integrated pressure—thermal sensors on flexible substrates

V. Shamanna; S. Das; Z. Çelik-butler; D. P. Butler; K. L. Lawrence

作者V. Shamanna; S. Das; Z. Çelik-butler; D. P. Butler; K. L. Lawrence
文件大小830.22KB
发表时间2006
DOI10.1088/0960-1317/16/10/010

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