Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications

• 作者L. J. Fernández; E. Berenschot; R. J. Wiegerink; J. Flokstra; H. V. Jansen; M. Elwenspoek
• 文件大小1430.98KB
• 发表时间2006
• DOI10.1088/0960-1317/16/4/024