SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 21 January 2006)] Photon Processing in Microelectronics and Photonics V - Inspection of defects and metallic contamination in SiGe:B CMOS using an in-line photoluminescence monitor
Liao, Chin-I; Buczkowski, Andrzej; Chien, C. C.; Huang, K. T.; Li, Zhiqiang; Walker, Tom; Hummel, Steve G.; Tzou, S. F.; Okada, Tatsuo; Arnold, Craig B.; Meunier, Michel; Holmes, Andrew S.; Geohegan, David B.; Träger, Frank; Dubowski, Jan J.
- 作者Liao, Chin-I; Buczkowski, Andrzej; Chien, C. C.; Huang, K. T.; Li, Zhiqiang; Walker, Tom; Hummel, Steve G.; Tzou, S. F.; Okada, Tatsuo; Arnold, Craig B.; Meunier, Michel; Holmes, Andrew S.; Geohegan, David B.; Träger, Frank; Dubowski, Jan J.
- 卷第6106卷
- 印刷ISSN0277-786X
- 文件大小726.33KB
- 发表时间2006
- DOI10.1117/12.645605