Acrylic polymer/silica hybrid for electron-beam resists
- 作者Toshiyuki Tamai; Yukihito Matsuura; Mitsuru Watanabe; Kimihiro Matsukawa
- 卷第44卷
- 期第6期
- 印刷ISSN0887-624X
- 电子ISSN1099-0518
- 文件大小619.23KB
- 发表时间2006
- DOI10.1002/pola.21320
- 页码2107-2116
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