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Modeling and experimental analysis of InGaN MOVPE in the Aixtron AIX 200/4 RF-S horizontal reactor

E. V. Yakovlev; R. A. Talalaev; R. W. Martin; C. Jeynes; N. Peng; C. J. Deatcher; I. M. Watson

作者E. V. Yakovlev; R. A. Talalaev; R. W. Martin; C. Jeynes; N. Peng; C. J. Deatcher; I. M. Watson
卷第3卷
期第6期
印刷ISSN1610-1634
电子ISSN1610-1642
文件大小176.36KB
发表时间2006
DOI10.1002/pssc.200565182
页码1620-1623