SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications
Bahadur, Issam B.; Tanner, Danelle M.; Ramesham, Rajeshuni; Mills, James K.
- 作者Bahadur, Issam B.; Tanner, Danelle M.; Ramesham, Rajeshuni; Mills, James K.
- 卷第6111卷
- 印刷ISSN0277-786X
- 文件大小297.78KB
- 发表时间2006
- DOI10.1117/12.644429