Effect of annealing temperature on properties of ZnO thin films on Si(111) substrates by magnetron sputtering

• 期刊名称The European Physical Journal Applied Physics
• 作者Xue, Shoubin; Zhuang, Huizhao; Xue, Chengshan; Teng, Shuyun; Hu, Lijun
• 卷第36卷
• 期第1期
• 印刷ISSN1286-0042
• 电子ISSN1286-0050
• 文件大小695.14KB
• 发表时间2006-10
• DOI10.1051/epjap:2006101
• 页码1-4