![Excimer laser doping using highly doped silicon nanoparticles]()
Excimer laser doping using highly doped silicon nanoparticlesMeseth, Martin; Kunert, Bernd Christian; Bitzer, Lucas; Kunze, Frederik; Meyer, Sebastian; Kiefer, Fabian; Dehnen, Martin; Orthner, Hans; Petermann, Nils; Kummer, Malin; Wiggers, Hartmut; Harder, Nils-Peter; Benson, Niels; Schmechel, Roland · physica status solidi (a) · 2013