Deposition of Nanocomposites by Plasmas
- 作者F. Faupel; V. Zaporojtchenko; H. Greve; U. Schürmann; V. S. K. Chakravadhanula; Ch. Hanisch; A. Kulkarni; A. Gerber; E. Quandt; R. Podschun
- 卷第47卷
- 期第7期
- 印刷ISSN0863-1042
- 电子ISSN1521-3986
- 文件大小351.21KB
- 发表时间2007
- DOI10.1002/ctpp.200710069
- 页码537-544
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