Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides

• 期刊名称oe/15/19/oe-15-19-11798.pdf
• 作者Hu, Juejun; Tarasov, Vladimir; Carlie, Nathan; Feng, Ning-Ning; Petit, Laeticia; Agarwal, Anu; Richardson, Kathleen; Kimerling, Lionel
• 卷第15卷
• 期第19期
• 电子ISSN1094-4087
• 文件大小175.17KB
• 发表时间2007
• DOI10.1364/OE.15.011798