Experimental study of a pre-ionized high power pulsed magnetron discharge

Vašina, P; Meško, M; Imbert, J C; Ganciu, M; Boisse-Laporte, C; Poucques, L de; Touzeau, M; Pagnon, D; Bretagne, J

期刊名称Plasma Sources Science and Technology
作者Vašina, P; Meško, M; Imbert, J C; Ganciu, M; Boisse-Laporte, C; Poucques, L de; Touzeau, M; Pagnon, D; Bretagne, J
卷第16卷
期第3期
印刷ISSN0963-0252
电子ISSN1361-6595
文件大小315.53KB
发表时间2007-08-01
DOI10.1088/0963-0252/16/3/009
页码501-510

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