Surface microstructuring of silica glass by laser-induced backside wet etching with a DPSS UV laser
- 作者Hiroyuki Niino; Yoshizo Kawaguchi; Tadatake Sato; Aiko Narazaki; Ryozo Kurosaki
- 卷第253卷
- 期第19期
- 印刷ISSN0169-4332
- 文件大小436.42KB
- 发表时间2007
- DOI10.1016/j.apsusc.2007.02.099
- 页码8287-8291
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