[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Two approaches to micromachining si heat exchanger for Joule-Thomson cryosurgical probes
Weibin Zhu, ; White, Michael J.; Hoch, Daniel W.; Nellis, Gregory F.; Klein, Sanford A.; Gianchandani, Yogesh B.
- 作者Weibin Zhu, ; White, Michael J.; Hoch, Daniel W.; Nellis, Gregory F.; Klein, Sanford A.; Gianchandani, Yogesh B.
- 文件大小1271.14KB
- 发表时间2007
- DOI10.1109/memsys.2007.4433062
- 页码317-320