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[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Two approaches to micromachining si heat exchanger for Joule-Thomson cryosurgical probes

[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Two approaches to micromachining si heat exchanger for Joule-Thomson cryosurgical probes

Weibin Zhu, ; White, Michael J.; Hoch, Daniel W.; Nellis, Gregory F.; Klein, Sanford A.; Gianchandani, Yogesh B.
  • 作者Weibin Zhu, ; White, Michael J.; Hoch, Daniel W.; Nellis, Gregory F.; Klein, Sanford A.; Gianchandani, Yogesh B.
  • 文件大小1271.14KB
  • 发表时间2007
  • DOI10.1109/memsys.2007.4433062
  • 页码317-320
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