Impact of Local Strain From Selective Epitaxial Germanium With Thin Si/SiGe Buffer on High-Performance p-i-n Photodetectors With a Low Thermal Budget

Loh, W. Y.; Wang, J.; Ye, J. D.; Yang, R.; Nguyen, H. S.; Chua, K. T.; Song, J. F.; Loh, T. H.; Xiong, Y. Z.; Lee, S. J.; Yu, M. B.; Lo, G. Q.; Kwong, D. L.

期刊名称IEEE Electron Device Letters
作者Loh, W. Y.; Wang, J.; Ye, J. D.; Yang, R.; Nguyen, H. S.; Chua, K. T.; Song, J. F.; Loh, T. H.; Xiong, Y. Z.; Lee, S. J.; Yu, M. B.; Lo, G. Q.; Kwong, D. L.
卷第28卷
期第11期
印刷ISSN0741-3106
文件大小260.72KB
发表时间2007-11
DOI10.1109/led.2007.906814
页码984-986

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Impact of Local Strain From Selective Epitaxial Germanium With Thin Si/SiGe Buffer on High-Performance p-i-n Photodetectors With a Low Thermal Budget