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[IEEE 2007 IEEE 20th International Vacuum Nanoelectronics Conference - Chicago, IL, USA (2007.07.8-2007.07.12)] 2007 IEEE 20th International Vacuum Nanoelectronics Conference - Improvements on an out-of-plane MEMS quadrupole for portable mass spectrometry

[IEEE 2007 IEEE 20th International Vacuum Nanoelectronics Conference - Chicago, IL, USA (2007.07.8-2007.07.12)] 2007 IEEE 20th International Vacuum Nanoelectronics Conference - Improvements on an out-of-plane MEMS quadrupole for portable mass spectrometry

Velasquez-Garcia, L. F.; Cheung, K.; Akinwande, A. I.
  • 作者Velasquez-Garcia, L. F.; Cheung, K.; Akinwande, A. I.
  • 文件大小507.70KB
  • 发表时间2007
  • DOI10.1109/ivnc.2007.4480906
  • 页码2-3
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