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Pneumatically actuated elastomeric device for nanoscale surface patterning

Pneumatically actuated elastomeric device for nanoscale surface patterning

Li, Shifeng; Dellinger, Timothy M.; Wang, Qin; Szegedi, Sandra; Liu, Chang
  • 期刊名称Applied Physics Letters
  • 作者Li, Shifeng; Dellinger, Timothy M.; Wang, Qin; Szegedi, Sandra; Liu, Chang
  • 卷第91卷
  • 期第2期
  • 印刷ISSN0003-6951
  • 文件大小620.62KB
  • 发表时间2007
  • DOI10.1063/1.2755930
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