Pneumatically actuated elastomeric device for nanoscale surface patterning
Li, Shifeng; Dellinger, Timothy M.; Wang, Qin; Szegedi, Sandra; Liu, Chang
- 期刊名称Applied Physics Letters
- 作者Li, Shifeng; Dellinger, Timothy M.; Wang, Qin; Szegedi, Sandra; Liu, Chang
- 卷第91卷
- 期第2期
- 印刷ISSN0003-6951
- 文件大小620.62KB
- 发表时间2007
- DOI10.1063/1.2755930