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[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Atomistic Modeling of Carbon Co-Implants and Rapid Thermal Anneals in Silicon

[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Atomistic Modeling of Carbon Co-Implants and Rapid Thermal Anneals in Silicon

Zographos, Nikolas; Martin-Bragado, Ignacio
  • 作者Zographos, Nikolas; Martin-Bragado, Ignacio
  • 文件大小1076.03KB
  • 发表时间2007
  • DOI10.1109/rtp.2007.4383829
  • 页码119-122
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