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Low resistivity Ga-doped ZnO thin films of less than 100 nm thickness prepared by ion plating with direct current arc discharge

Low resistivity Ga-doped ZnO thin films of less than 100 nm thickness prepared by ion plating with direct current arc discharge

Yamada, Takahiro; Miyake, Aki; Kishimoto, Seiichi; Makino, Hisao; Yamamoto, Naoki; Yamamoto, Tetsuya
  • 期刊名称Applied Physics Letters
  • 作者Yamada, Takahiro; Miyake, Aki; Kishimoto, Seiichi; Makino, Hisao; Yamamoto, Naoki; Yamamoto, Tetsuya
  • 卷第91卷
  • 期第5期
  • 印刷ISSN0003-6951
  • 文件大小524.55KB
  • 发表时间2007
  • DOI10.1063/1.2767213
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